Excimer lamp apparatus
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United States of America Patent
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Mar 6, 2007
Grant Date -
May 11, 2006
app pub date -
Apr 26, 2005
filing date -
Jun 23, 2004
priority date (Note) -
Expired
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Abstract
The invention provides an excimer lamp apparatus that has advanced start-up properties, in terms of start-up time and start-up stability, in the presence of voltage variations, without any trigger electrode, by arranging a pair of electrodes along the entire length of a discharge container. An ultra-violet emitter is arranged to irradiate discharge gas in the discharge container with ultra-violet light, and the excimer lamp is started up by means of exposure with ultra-violet light from the ultra-violet emitting unit.
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