Complex microdevices and apparatus and methods for fabricating such devices
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United States of America Patent
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Mar 6, 2007
Grant Date -
Oct 2, 2003
app pub date -
Dec 6, 2002
filing date -
Dec 6, 2001
priority date (Note) -
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Abstract
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB.TM.)
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