Rotating sputtering magnetron
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Feb 27, 2007
Grant Date -
May 19, 2005
app pub date -
Nov 3, 2004
filing date -
Nov 5, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The magnet arrangement and resulting rotating sputtering magnetron design of an embodiment provides magnetic flux density and distribution to penetrate thick production ferrous targets. Further, the magnetic field shape improves target life by more uniformly removing target material.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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DEXTER MAGNETIC TECHNOLOGIES INC | 1050 MORSE AVENUE ELK GROVE VILLAGE IL 60007 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Li, Chun | Plainview, NY | 158 | 1857 |
# of filed Patents : 158 Total Citations : 1857 | |||
Padua, Christopher | Campbell, CA | 1 | 6 |
# of filed Patents : 1 Total Citations : 6 | |||
Stelter, Richard | Buford, GA | 2 | 7 |
# of filed Patents : 2 Total Citations : 7 | |||
Welk, Aron | Tracy, CA | 4 | 8 |
# of filed Patents : 4 Total Citations : 8 |
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Patent Citation Ranking
- 3 Citation Count
- C23C Class
- 3.52 % this patent is cited more than
- 18 Age
Forward Cite Landscape
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Jan 27, 2023 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8 |
Jan 23, 2019 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4 |
Aug 04, 2015 | I | Issuance | |
Jul 15, 2015 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Feb 27, 2014 | P | Published | |
Feb 14, 2013 | F | Filing | |
Dec 07, 2006 | PD | Priority Date |

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