Thermal infrared detector having a small thermal time constant and method of producing the same
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United States of America Patent
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Feb 20, 2007
Grant Date -
May 13, 2004
app pub date -
Oct 31, 2003
filing date -
Nov 1, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In an area of a diaphragm 5 as an infrared photosensitive portion of a thermal infrared detector, a fourth dielectric protective film 8c is etched and reduced in thickness to form a fifth dielectric protective film 8d so that the thickness of the diaphragm 5 as a whole is reduced. With this structure, the thermal capacity of the diaphragm 5 is decreased and the thermal time constant is reduced. This enables the thermal infrared detector to be operated at a high frame rate. A bolometer thin film 7 is formed throughout an entire surface of the diaphragm 5.
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