Protective film and method for preparing same
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United States of America Patent
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-
Jan 23, 2007
Grant Date -
Nov 6, 2003
app pub date -
Jun 11, 2003
filing date -
Aug 18, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A high-quality protective film for a dry film resist is provided. A film of a polyethylene is used as the protective film, the polyethylene being prepared by pressurizing ethylene with use of an ultra-high pressure compressor and then polymerizing the ethylene at a reaction temperature of 190.degree. to 300.degree. C. and a reaction pressure of not lower than 167 MPa in the presence of a radical polymerization initiator, or by pressuring ethylene with use of an ultra-high pressure compressor and then polymerizing the ethylene at a reaction temperature of 190.degree. to 300.degree. C. in the presence of a radical polymerization initiator while allowing a radical polymerization inhibitor to be present in the reaction system.
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