Heat exchanger

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United States of America Patent

PATENT NO 7163053
APP PUB NO 20040194937A1
SERIAL NO

10825744

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Abstract

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A method for adjusting temperature of a machining liquid, e.g., slurry, etching liquid, by passing the machining liquid through a heat exchanger. The heat exchanger, which adjusts the temperature of the machining liquid, includes a ceramic heat exchanging tube which is made by baking silicon carbide (SiC).

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Patent Owner(s)

Patent OwnerAddress
FUJIKOSHI MACHINERY CORP1650 KIYONO MATSUSHIRO-MACHI NAGANO-SHI NAGANO 381-1233

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Yoshio Nagano, JP 134 1806
Otsuka, Yoshio Nagano, JP 14 314

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