Pressure sensor with monolithic body and circuit-bearing membrane attached thereto
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United States of America Patent
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Jan 16, 2007
Grant Date -
Nov 17, 2005
app pub date -
May 5, 2005
filing date -
Nov 6, 2002
priority date (Note) -
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Abstract
An absolute or relative pressure sensor formed of a monolithic plastic body (2) includes a carrier body (3) and a membrane (4). A printed circuit including wire strain gauges and comprised of a polymer paste is disposed on the membrane (4). The membrane (4) is shaped so as to be very soft affording high pressure sensitivity, while the circuit includes electric terminals (7) which may be embedded in the monolithic body (2) during manufacture to eliminate subsequent mounting of these terminals in simplifying production and reducing cost. By connecting the membrane (4) to an element embedded in the monolithic body (2), membrane elasticity may be adjusted to provide the pressure sensor with a desired sensitivity for a specific application. The embedded element is preferably formed as a core of the membrane which is completely surrounded by the plastic monolithic body (2) using a vacuum container (8).
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