Method of preparing oxide crystal film/substrate composite and solution for use therein
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United States of America Patent
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Jan 9, 2007
Grant Date -
Oct 28, 2004
app pub date -
May 15, 2002
filing date -
May 15, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
There is provided a process for preparing a composite material of an oxide crystal film and a substrate by forming a Y123 type oxide crystal film from a solution phase on a substrate using a liquid phase method, wherein problems such as cracking of the oxide crystal film, separation of the oxide crystal film from the substrate, and development of a reaction layer between the substrate and the solution can be minimized. The solvent for forming the solution phase uses either a BaO--CuO--BaF.sub.2 system or a BaO--CuO--Ag--BaF.sub.2 system, and when the substrate with a seed crystal film bonded to the surface is brought in contact with the solution to form (grow) the oxide crystal film on the substrate, the temperature of the solution is controlled to a temperature of no more than 850.degree. C.
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Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| JP | A | JP2002338392 | May 15, 2001 |
| JP | A | JP2002338393 | May 15, 2001 |
| EP | A1 | EP1391543 | May 15, 2002 |
| WO | A1 | WO2002101123 | May 15, 2002 |
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- 1 Citation Count
- H01L Class
- 2.46 % this patent is cited more than
- 18 Age
