Vacuum chamber assembly
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United States of America Patent
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-
Jan 9, 2007
Grant Date -
Sep 30, 2004
app pub date -
Mar 24, 2004
filing date -
Mar 26, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A vacuum chamber assembly comprises a floor plate, an upper plate, plural props standing on the floor plate to support the upper plate, and side plates closing side opening portions between the props. First connected portions between the floor plate and the props and second connected portions between the upper plate and the props are fixed by screws. Circumferential edge portions of the side opening portions are provided with installation grooves, respectively. A gasket includes side surface sealing portions installed in the installation grooves formed on the circumferential edge portions of the side opening portions, respectively, and connection sealing portions for sealing the first connected portions and the second connected portions. The side plates are fixed to the circumferential edge portions to close the side opening portions via the side surface sealing portions of the gasket, respectively.
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