Ultrasonic probe and manufacturing method thereof
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United States of America Patent
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Dec 12, 2006
Grant Date -
Jan 22, 2004
app pub date -
Jul 15, 2003
filing date -
Jul 19, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An ultrasonic probe for use in an ultrasonic diagnosis apparatus for a living body comprises an array transducer made up of a plurality of layered transducer elements. A specified structure (face-to-face structure) is created across two adjacent transducer elements. In each transducer element, a first vertical electrode layer for ground is connected with a top electrode layer and an inner electrode layer, and a second vertical electrode layer for signal is connected with a bottom electrode layer and an inner electrode layer. When creating the specified structure, steps including formation of slits in a layered assembly and filling of the slits or the like are repeated. By finally forming a plurality of separating slits, the layered assembly is divided into a plurality of transducer elements. On the other hand, each transducer element is compounded in the horizontal direction. The compounding is performed at any stage of before, during or after formation of the specified structure.
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