Integrated high vacuum pumping system

United States of America Patent

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Nov 28, 2006
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Aug 11, 2004
filing date
Aug 11, 2004

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Abstract

The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-vacuum system.

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Patent Owner(s)

Patent Owner	Address
EDWARDS VACUUM LLC	6416 INDUCON DRIVE WEST SANBORN NY 14132

International Classification(s)

F04B:POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bailey, Christopher M	Pleasanton, CA	7	89
Boger, Michael S	Corvallis, OR	4	45
Enomoto, Yoshihiro	Narashino, JP	38	186
Murphy, Daimhin Paul	San Francisco, CA	7	26

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Integrated high vacuum pumping system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10916081

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US Family Size	Non-US Coverage
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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 28, 2006	US,7140847,B2 US7140847B2	GRANTED PATENT AS SECOND PUBLICATION
February 16, 2006	US,20060034715,A1 US20060034715A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7140847
SERIAL NO	10916081
DOCKET NO

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10916081

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