Integrated turbo/drag/regenerative pump with counter-rotating turbo blades
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United States of America Patent
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Nov 28, 2006
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app pub date -
Nov 4, 2004
filing date -
Nov 4, 2004
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Abstract
The present invention relates to vacuum pumps and a method for creating and maintaining a high vacuum. A vacuum pump includes a regenerative section and a turbo-molecular section. A common first rotor carries forward-rotating elements of both the regenerative section and the turbo-molecular section. Additionally, a second rotor carries counter-rotating elements of the turbo-molecular section. A first drive rotates the first rotor in a forward rotational direction while a second drive rotates the second rotor in a counter-rotational direction. The drives may be controlled to drive the common first rotor on start-up, and to later drive the second rotor.
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