Diffraction grating having high throughput efficiency
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United States of America Patent
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Nov 21, 2006
Grant Date -
Apr 28, 2005
app pub date -
Jan 6, 2004
filing date -
Jan 6, 2003
priority date (Note) -
Expired
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Abstract
A reflective diffraction grating having grooves and ridges and providing high throughput efficiency in the minus-first diffraction order. All but the zeroth diffraction order and the minus-first diffraction order may be prevented from existence by directing the radiation onto the grating at an appropriate angle. The radiation having a TM polarization is eliminated from the zeroth order by destructive interference by appropriate selection of a the groove width of the grating, and radiation having a TE polarization is eliminated from the zeroth order by destructive interference by depositing an overcoat of an appropriate thickness. A dielectric material may be deposited in the grooves.
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