Movable stage, XY stage, head carriage and tester of magnetic head or magnetic disk

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United States of America Patent

PATENT NO 7135861
SERIAL NO

10803943

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Pressing means is provided to press a movable base to a surface of a reference base to make the movable base in contact with the surface of the reference base to thereby lock-down the movable base on the surface of the reference base. The movable base is moved while slightly floating with respect to the reference base. A movable floating mechanism is provided to float the movable base from the reference base against pressing force of the pressing means exerted on the movable base to thereby relieve the locking. A floating amount of the movable base from the reference base may be small enough to reduce or substantially remove sliding friction between the movable base and the reference base. For example, the floating amount may be as small as ten to several hundreds microns.

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Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECH ELECTRONICS ENGINEERING CO LTDTOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mori, Kyoichi Kanagawa, JP 37 330
Sugiyama, Toshinori Kanagawa, JP 120 714
Yamasaki, Fujio Kanagawa, JP 5 37

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