Device for handling substrates inside and outside a clean room
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United States of America Patent
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Nov 14, 2006
Issued Date -
N/A
app pub date -
Apr 13, 2000
filing date -
May 8, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room conditions can be removed from or placed in said box (13); and with a first handling device (51), by which means the substrates (11) can be placed in or removed from the cassette (12). According to the invention, a storage area (20) for a plurality of cassette boxes (13) is positioned on or above the clean room (15) and the locking transfer device (17) is provided between the storage area (20) and the clean room (15), so that various work and production steps can be combined in such a way as to save space.
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