Double-effect pyrotechnic microactuator for microsystem and microsystem using same
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United States of America Patent
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Nov 14, 2006
Grant Date -
Nov 24, 2005
app pub date -
Nov 18, 2003
filing date -
Nov 19, 2002
priority date (Note) -
Expired
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Abstract
The invention concerns the technical field of micro-actuators used for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical functions such as microfluidics integrating cards. The invention concerns a micro-actuator comprising a so-called main chamber, made in a solid support and containing a so-called main pyrotechnic charge, the main chamber being sealed and delimited by solid support walls and by a deformable membrane, such that the gases emitted by the combustion of the main pyrotechnic charge, enable the volume of the chamber to be increased by deforming the membrane while maintaining intact the solid walls of the main chamber. The invention is characterized in that it comprises means for evacuating the gases from the main chamber.
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