Apparatus for detecting defect in circuit pattern and defect detecting system having the same
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United States of America Patent
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Oct 31, 2006
Grant Date -
Dec 1, 2005
app pub date -
Jun 1, 2004
filing date -
Jun 1, 2004
priority date (Note) -
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Abstract
Provided is an apparatus for detecting a defect of a circuit pattern which includes a resonator, a first power supply unit connected to one end of the resonator to apply power to the resonator, a probe connected to the other end of the resonator to contact one end of the circuit pattern, a second power supply unit connected to the other end of the circuit pattern to apply a voltage thereto, and a detection portion connected between the resonator and the probe to measure a voltage generated from the circuit pattern and generate a measurement voltage, and determine presence of a defect in the circuit pattern from the measurement voltage.
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