VACUUM IONIZATION GAUGE WITH HIGH SENSITIVITY

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United States of America Patent

APP PUB NO 20060261819A1
SERIAL NO

11187738

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A vacuum ionization gauge (30) includes a cathode (31), an anode ring (33), a shield electrode (32), an ion educed electrode (34), a reflector (35) and a collector (36). The cathode is positioned corresponding to a first opening of the shield electrode, and the ion educed electrode is positioned corresponding to an opposite second opening of the shield electrode. An ion educed hole (341) is defined in a middle of the ion educed electrode. The reflector has a curving surface generally surrounding the second opening of the shield electrode. The collector is positioned at a center of the curving surface of the reflector and points toward the ion educed hole. The anode ring is positioned in the middle of the shield electrode. The vacuum ionization gauge is small volume and has low power consumption and improved sensitivity.

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Patent Owner(s)

Patent OwnerAddress
HON HAI PRECISION INDUSTRY CO LTDNEW TAIPEI
TSINGHUA UNIVERSITYBEIJING

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Pi Jin Beijing, CN 5 16
Fan, Shou Shan Beijing, CN 41 384
Guo, Cai Lin Beijing, CN 3 12
Hu, Zhao Fu Beijing, CN 4 13
Liu, Liang Beijing, CN 768 9740
Liu, Peng Beijing, CN 833 6111
Sheng, Lei Mei Beijing, CN 4 12
Wei, Yang Beiging, CN 346 1584

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