Device and method of positionally accurate implantation of individual particles in a substrate surface
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 24, 2006
Grant Date -
Apr 14, 2005
app pub date -
Oct 9, 2003
filing date -
Oct 9, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Loading Importance Indicators... 
Abstract
A device and a method for positionally accurate implantation of individual particles in a substrate surface (1a) are described. A diaphragm for a particle beam to be directed onto the substrate surface (1a) and a detector provided thereon in the form of a p-n junction for determining a secondary electron flow produced upon impact of a particle onto the substrate surface (1a) are provided on a tip (4) which is formed on a free end portion of a flexible arm (2) to be mounted on one side. The device is part of a scanning device operating according to the AFM method.
First Claim
Other Claims data not available
Family
Loading Family data...
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
- 3 Citation Count
- G02B Class
- 1.76 % this patent is cited more than
- 19 Age
