Phase contrast microscope for short wavelength radiation and imaging method
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United States of America Patent
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Oct 10, 2006
Grant Date -
Jul 1, 2004
app pub date -
Dec 27, 2002
filing date -
Dec 27, 2002
priority date (Note) -
Expired
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Abstract
A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabricated on the same high-transmissive substrate. The use of this composite optic allows for lithographic-based alignment that will not change over the lifetime of the instrument. Also, in one configuration, the phase plate is located between the test object and the objective.
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