Fabrication method of thin-film transistor array with self-organized organic semiconductor
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United States of America Patent
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Oct 10, 2006
Grant Date -
Aug 11, 2005
app pub date -
Jul 1, 2004
filing date -
Feb 10, 2004
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Expired
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Abstract
The present invention relates to a method of selectively depositing an organic semiconductor material and a method of manufacturing an organic semiconductor thin film transistor array. Since the thin film transistor array is formed by locally performing a plasma process on a substrate before depositing an organic semiconductor active layer on the substrate, the organic semiconductor material is deposited on only the organic semiconductor active layer having an island shape. Therefore, it is not necessary to use a shadow mask method or a photolithography method to manufacture an active matrix array. Accordingly, the present invention has advantages in that it is possible to obtain a high resolution thin film transistor array and to prevent characteristics of the thin film transistors in the array from being deteriorated.
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