Shaped non-contact capacitive displacement sensors for measuring shaped targets
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United States of America Patent
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Oct 3, 2006
Grant Date -
Sep 23, 2004
app pub date -
Mar 4, 2004
filing date -
Mar 19, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An improved non-contact capacitive displacement sensor that may be employed for accurately measuring small distances between the sensor and shaped targets. The non-contact capacitive displacement sensor includes a probe having a sensor element and a guard element. The guard element substantially surrounds the sensor element. At least the sensor element has a shape that substantially matches the shape of a target element.
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