System and method for filtering output in mass flow controllers and mass flow meters
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United States of America Patent
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Sep 26, 2006
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N/A
app pub date -
Aug 26, 2004
filing date -
Apr 27, 2001
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Expired
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Abstract
Embodiments of the present invention can include the steps of (i) filtering the indicated flow to derive an intermediate filtered indicated flow, (ii) deriving a weighted first derivative of the intermediate filtered indicated flow, and (iii) outputting a filtered indicated flow comprising the sum of the intermediate filtered indicated flow and the weighted first derivative of the intermediate filtered indicated flow. The indicated flow can be filtered using a FIR, an IIR a running average or other filtering scheme.
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