Thin film supporting substrate for used in filter for hydrogen production filter and method for manufacturing filter for hydrogen production
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United States of America Patent
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Sep 26, 2006
Grant Date -
Dec 9, 2004
app pub date -
Jul 23, 2003
filing date -
Jul 25, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a through hole closing process, a metal plate is attached to one surface of a conductive base member having a plurality of through holes by the use of a magnet, in a copper plating process, a copper plating layer is formed on the conductive base member and the metal plate exposed within the through holes, from the side of the conductive base member where the metal plate is not attached, thereby to fill up the through holes, in a film forming process, a Pd alloy film is formed by plating on the surface of the conductive base member after removal of the metal plate, and in a removal process, the copper plating layer is removed by selective etching, thereby to produce a hydrogen production filter that is used in a reformer of a fuel cell so as to be capable of stably producing high purity hydrogen gas.
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