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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LIMITED	1 YISHUN AVENUE 7 SINGAPORE 768923

International Classification(s)

• G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bleeker, Arno Jan	Westerhoven, NL	99	3022
de, Jager Pieter Willem Herman	Rotterdam, NL	85	1247
Kruit, Pieter	Delft, NL	103	1318
van, der Mast Karel Diederick	Helmond, NL	28	879

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 05, 2006	US,7102732,B2   US7102732B2	GRANTED PATENT AS SECOND PUBLICATION
November 06, 2003	US,20030206283,A1   US20030206283A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7102732

Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element

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