Method and system for non-contact measurement of microwave capacitance of miniature structures of integrated circuits
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United States of America Patent
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Sep 5, 2006
Grant Date -
Oct 13, 2005
app pub date -
May 26, 2005
filing date -
Nov 21, 2003
priority date (Note) -
Expired
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Abstract
A method and system for non-contact measurements of microwave capacitance of miniature structures patterned on wafers used for production of modern integrated circuits. A near-field balanced two-conductor probe is brought into close proximity to a test key built on a wafer of interest and replicating the miniature structure of interest. The resonant frequency of the probe for the test key is measured. The probe is then positioned at the same distance from an 'open' calibration key and 'short' calibration key, and the resonance frequencies of the probe for the calibration keys are measured. A shear force distance control mechanism maintains the distance between the tip of the probe and the measured test key and calibration keys. The microwave capacitance of the test key is then calculated in accordance with a predefined formula. The obtained microwave capacitance of the test key is indicative of the capacitance of the miniature structure of interest and may be further used for determining possible defects of the integrated circuit of interest.
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