Double sided polishing machine
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United States of America Patent
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Sep 5, 2006
Grant Date -
Feb 23, 2006
app pub date -
Apr 12, 2005
filing date -
Aug 20, 2004
priority date (Note) -
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Abstract
Double-sided polishing machine with an upper and a lower working disc, each comprising a polishing disc and a carrier disc. The working disc are co-axially arranged and rotatable relative to each other, a polishing gap being formed between the polishing discs. Said workpieces are machined in the polishing gap. A temperature control device being at least provided for the upper working disc by which a temperature control fluid can be conveyed through passages in the upper working disc. A spacing measuring device being associated with the working discs which measure the spacing in the polishing gap (gap width .mu.) at two radial spaced points of the polishing gap.
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