Non-rubbing gate valve for semiconductor fabrication apparatus
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United States of America Patent
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Sep 5, 2006
Grant Date -
Mar 3, 2005
app pub date -
Aug 19, 2004
filing date -
Aug 26, 2003
priority date (Note) -
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Abstract
A gate valve includes a valve main body having a gate valve body attached to a valve rod; a movement operation mechanism that moves the valve rod in a direction along an axis of the rod up to a position where the gate valve body stops up a flow passage port used for carrying in and out objects; a rotating motion mechanism for rotating the valve rod, which has been moved to that position, by a predetermined angle; and a horizontal drive gear for moving the valve body in a direction orthogonal to the direction of movement of the valve rod to seal the flow passage port.
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