Apparatus for planarizing a probe card and method using same
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United States of America Patent
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Aug 29, 2006
Grant Date -
Mar 24, 2005
app pub date -
Jul 28, 2004
filing date -
Jul 28, 2003
priority date (Note) -
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Abstract
An apparatus for use with a wafer prober and a probe card comprising a stiffening member having a feature defining a first plane. The stiffening member is mountable atop the central portion of the probe card. A reference member is provided to mount to the wafer prober and has an underside with a feature defining a second plane. When the feature of the stiffening member defining the first plane is urged against the feature of the reference member defining a second plane the probe tips of the probe card are substantially planarized relative to the wafer prober.
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