Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby
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United States of America Patent
Stats
-
Aug 29, 2006
Grant Date -
Nov 17, 2005
app pub date -
May 12, 2004
filing date -
May 12, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling a bottom surface of the probe tip.
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Patent Citation Ranking
- 3 Citation Count
- G01B Class
- 2.20 % this patent is cited more than
- 19 Age
