Photo-imageable compositions of norbornene and acrylate copolymers and use thereof
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United States of America Patent
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Aug 8, 2006
Grant Date -
Apr 1, 2004
app pub date -
Jul 7, 2003
filing date -
Jun 18, 1997
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Expired
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Abstract
Embodiments in accordance with the present invention encompass photo-imageable compositions that include polymers of acrylate-type monomers and norbornene-type monomers. In some embodiments a catalyst system comprising a cationic or a neutral Pd(II) dimer component having the formula (Allyl)Pd(P(R.sup.21).sub.3) or (L')[(L)Pd(R)(X)].sub.2, respectively is employed to effect polymerization. In other embodiments a free radical or living free radical catalyst is employed to effect polymerization. At least one of the acrylate-type monomers and norbornene-type monomers of the polymer embodiments of the present invention encompass an acid labile moiety. Some polymer embodiments of the present invention include more than one type of acrylate-type monomer and norbornene-type monomer. Embodiments of the present invention include forming a patterned layer on a substrate and some embodiments include transferring the patterned structure to a material layer first formed on the substrate.
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