Turbo molecular high-vacuum pump with a circular intake area
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United States of America Patent
Stats
-
Aug 8, 2006
Issued Date -
N/A
app pub date -
Sep 11, 2004
filing date -
Mar 14, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a turbo-molecular pump with a high vacuum-side induction area and of a rotational symmetrical arrangement, comprising a compressor turbine including a rotor and a stator tube having axially alternately tightly arranged rotor blade rings and stator vane rings with oppositely oriented blade and vane surfaces, a pre-vacuum chamber with a gas guide structure for the connection of a pre-pumping system, a drive module and a bearing unit, the turbo-molecular pump has a center area with a central coaxial open space extending from an ambient end to the high vacuum-side induction area and the open space is closed at its end adjacent the ambient end thereof by a flange in a vacuum-tight manner or is connected to a vacuum recipient, and the high-vacuum end of this space is separated from a pre-vacuum space.
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Cited Art Landscape
Patent Citation Ranking
- 3 Citation Count
- F01D Class
- 1.72 % this patent is cited more than
- 19 Age
