Direct-write system and method for roll-to-roll manufacturing of reflective gratings
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United States of America Patent
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Aug 1, 2006
Grant Date -
Apr 21, 2005
app pub date -
Oct 15, 2003
filing date -
Oct 15, 2003
priority date (Note) -
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Abstract
A reflective grating for precision location measurement. In one embodiment, the reflective grating has a non-reflective substrate and a non-reflective adhesion layer disposed on the substrate layer. A reflective surface layer is disposed on the adhesion layer. In another embodiment, the reflective grating is manufactured on the reflective (polished) surface of a monolithic substrate. A series of grating lines are formed in the reflective surface layer by vaporizing portions of the reflective surface layer with a laser in order to expose the non-reflective adhesion layer. Accordingly, alternating reflective and non-reflective grating lines are formed that are used for making precision measurements.
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