Pressure sensor apparatus and method
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United States of America Patent
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Aug 1, 2006
Grant Date -
Dec 23, 2004
app pub date -
Jun 18, 2003
filing date -
Jun 18, 2003
priority date (Note) -
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Abstract
A pressure sensor apparatus is disclosed herein, which generally includes a sensor element, a flexible sensor diaphragm in intimate contact with the sensor element at all pressure levels and temperatures, and a package base and a package cover for hermetically sealing the sensor element and the flexible sensor diaphragm within a hermetically sealed sensor package to provide pressure sensor data thereof. The sensor element can be implemented as a quartz sense element to produce a SAW pressures sensor. The pressure sensor apparatus can be alternatively based on other sensing technologies, such as silicon piezoresistive, ceramic capacitive and others.
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