MEMS and method of manufacturing MEMS
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United States of America Patent
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Jul 25, 2006
Grant Date -
Dec 16, 2004
app pub date -
Mar 4, 2004
filing date -
May 18, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to micro electro-mechanical systems (MEMS) and production methods thereof, and more particularly to vertically integrated MEMS systems. Manufacturing of MEMS and vertically integrated MEMS is facilitated by forming, preferably on a wafer level, plural MEMS on a MEMS layer selectively bonded to a substrate, and removing the MEMS layer intact.
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