Compact microcolumn for automated assembly
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United States of America Patent
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Jul 25, 2006
Grant Date -
Sep 15, 2005
app pub date -
Mar 12, 2004
filing date -
Mar 12, 2004
priority date (Note) -
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Abstract
A microcolumn including an assembly substrate and a plurality of beam modification components. The assembly substrate includes a plurality of sockets, and the beam modification components each include a connector coupled to a corresponding one of the sockets. Assembly of the beam modification components to the assembly substrate may employ automation and/or automated calibration, including automated motion of robotic stages in a substantially automated manner.
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