Method of fabricating a p-type ohmic electrode in gallium nitride based optical device

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United States of America Patent

PATENT NO 7081401
APP PUB NO 20030183828A1
SERIAL NO

10390626

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Abstract

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A p-type ohmic electrode in a gallium nitride based(GaN based) optical device and a fabrication method thereof. The p-type ohmic electrode in a GaN based optical device is fabricated using a rutile structure transition metal layer, such as an Ru, Ir or Os layer, or an oxide layer thereof, or using a double layer comprised of an Ru layer as a base layer and an Ni layer, an ITO layer or an AuO layer on the Ru layer. Thus, the p-type ohmic electrode is good in light transmittance and is thermally stable while having low contact resistance with the p-GaN layer.

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Patent OwnerAddress
POSTECH ACADEMY-INDUSTRY FOUNDATION77 CHEONGAM-RO NAM-GU GYEONGSANGBUK-DO POHANG 37673

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jang, Ho Won Euiseong-gun, KR 22 113
Lee, Jong Lam Pohang, KR 51 553

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