System and method for determining the alignment quality in an illumination system that includes an illumination modulator
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United States of America Patent
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Jul 18, 2006
Grant Date -
N/A
app pub date -
Aug 27, 2003
filing date -
Aug 27, 2003
priority date (Note) -
Expired
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Abstract
An alignment detection system is disclosed for determining whether a modulated illumination field in an imaging system employing an illumination modulator is mis-aligned. The alignment detection system includes a modulator adjustment unit for providing a test pattern on the illumination modulator, a detector for receiving a modulated illumination field from the illumination modulator, a sampling unit for determining at least two sample values (A and C) for each of two areas of the modulated illumination field respectively, and an evaluation unit for determining whether the value |A-C| is greater than a threshold value.
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