Multi-axes, sub-micron positioner
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United States of America Patent
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Jul 18, 2006
Issued Date -
N/A
app pub date -
Oct 4, 2004
filing date -
Jul 16, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.
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