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Abstract

An apparatus and method of analyzing a sample to be scanned within a hermetically sealed housing of an atomic force microscope (AFM) while the interior of the housing is maintained at one of a number of various environmental conditions. The AFM includes an XYZ stage assembly on which a sample holder supporting the sample may be releasably positioned. The stage assembly allows for the manipulation of the sample and sample holder in the X, Y and Z axes without disturbing any environmental condition present within the chamber due to the hermetic seal maintained between the stage assembly and the AFM during the motion of the stage assembly. The ability of the stage assembly to manipulate the sample in each of the three directions while the sample is enclosed within the AFM also allows the AFM to compensate for non-parallel scanning planes and for drift in all three directions occurring in the sample because of the different environmental conditions in which the sample may be scanned. The scan is performed by the AFM using a scanning tube sealingly disposed within the housing and capable of moving small distances in the X, Y and Z axes. Fine adjustments to the position of the tube in order to accurately scan the sample are accomplished by the inclusion of sectioned piezoelectric elements within the tube which are capable of adjusting the position of a probe or cantilever attached to the end of the tube in small, highly accurate distances in each of the X, Y and Z directions.

First Claim