Microchannel plates and biochip arrays, and methods of making same
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United States of America Patent
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Jul 11, 2006
Issued Date -
N/A
app pub date -
Mar 12, 2004
filing date -
Sep 12, 2001
priority date (Note) -
Expired
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Abstract
A novel method of manufactring a microchannel plate ('MCP') is disclosed. The method comprises the steps of ion implantation of a substrate, the subsequent formation of channels paterned on the surface of the substrate and bonding of the subsequent substrate to a handle wafer. The layers are subsequently cleaved and the steps repeated until a MCP structure is achieved. The resulting MCP structure is cost-effective as compared to conventional manufacturing processes and the resulting MCP structure exhibits a funneling effect. The MCP structure may also be used for optical signal amplification for a biochip array.
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