Injection pinch discharge extreme ultraviolet source
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United States of America Patent
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Jul 11, 2006
Grant Date -
Aug 18, 2005
app pub date -
Aug 4, 2004
filing date -
Feb 13, 2004
priority date (Note) -
Expired
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Abstract
A source of extreme ultraviolet or soft X-ray photon source includes discharge chamber containing a buffer gas, first and second electrodes in the discharge chamber configured to deliver a heating current to a plasma discharge region, and an injector to project a particle of a working substance into the plasma discharge region. The particle is evaporated and ionized by the heating current to form a hot plasma that radiates extreme ultraviolet or soft X-ray photons.
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