Flood gun for charge neutralization
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United States of America Patent
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Jun 27, 2006
Grant Date -
Sep 22, 2005
app pub date -
Mar 4, 2005
filing date -
Mar 5, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A flood gun 10 for charge neutralization of an analysis region R.sub.a of a sample S downstream of the flood gun, comprising: a first source 30 of electrons; a second source 50 of positively charged particles; and an extraction and focusing assembly 60,64, arranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area A.sub.e at the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area A.sub.i at the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralization and a spectroscopic system for secondary particle emission analysis are disclosed.
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