Method of manufacturing a fixed abrasive material
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United States of America Patent
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Jun 27, 2006
Grant Date -
Aug 26, 2004
app pub date -
Feb 21, 2003
filing date -
Feb 21, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/m.sup.3 to 1200 kg/m.sup.3.
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