Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system
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United States of America Patent
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Jun 13, 2006
Grant Date -
Jan 31, 2002
app pub date -
Mar 14, 2001
filing date -
Mar 14, 2000
priority date (Note) -
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Abstract
A detector system for a particle beam apparatus, in particular for a scanning electron microscope, has a target structure, which in a central region near the optical axis includes an electron-converting material. The target structure also includes either a non-converting material in a region remote from the optical axis or the region remote from the optical axis is offset in the direction of the optical axis with respect to the region near the optical axis that includes the electron-converting material. The detector system makes possible separate detection of only back-scattered electrons or only secondary electrons.
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