Microelectromechanical system with non-collinear force compensation
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United States of America Patent
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Jun 6, 2006
Grant Date -
Sep 18, 2003
app pub date -
Mar 12, 2002
filing date -
Mar 12, 2002
priority date (Note) -
Expired
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Abstract
A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.
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