Tungsten plug corrosion prevention method using ionized air
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United States of America Patent
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May 30, 2006
Grant Date -
Apr 28, 2005
app pub date -
Oct 28, 2003
filing date -
Oct 28, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Disclosed herein is a method of making integrated circuits. In one embodiment the method includes forming tungsten plugs in the integrated circuit and forming electrically conductive interconnect lines in the integrated circuit after formation of the tungsten plugs. At least one tungsten plug is electrically connected to at least one electrically conductive interconnect line. Thereafter at least one electrically conductive interconnect line is exposed to ionized air.
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