Method for making tapered opening for programmable resistance memory element
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United States of America Patent
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May 16, 2006
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N/A
app pub date -
Mar 24, 2003
filing date -
Sep 19, 2001
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Abstract
A method for making a tapered opening. The defined tapered opening is useful for the fabrication of programmable resistance memory elements. The programmable resistance memory material may be a chalcogenide.
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