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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
MICELL TECHNOLOGIES INC	7516 PRECISION DRIVE RALEIGH NC 27617

International Classification(s)

• B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

• 2002 Application Filing Year
• B08B Class
• 673 Applications Filed
• 260 Patents Issued To-Date
• 38.64 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
DeYoung, James P	Durham, NC	51	840
# of filed Patents : 51 Total Citations : 840
Gross, Stephen M	Chapel Hill, NC	41	580
# of filed Patents : 41 Total Citations : 580
McClain, James B	Raleigh, NC	141	3182
# of filed Patents : 141 Total Citations : 3182

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Patent Citation Ranking

• 17 Citation Count
• B08B Class

• 53.01 % this patent is cited more than
• 19 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 16, 2006	US,7044143,B2   US7044143B2	GRANTED PATENT AS SECOND PUBLICATION
February 20, 2003	US,20030033676,A1   US20030033676A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7044143

Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems

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Abstract

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Microelectronic substrate processing systems include a microelectronic substrate processing chamber that is configured to contain therein at least one microelectronic substrate. A carbon dioxide supply system is configured to supply densified carbon dioxide to the microelectronic substrate processing chamber. A detergent supply system is configured to supply detergent to the microelectronic substrate processing chamber.

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Description

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Claims

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Legal Events

 

• STCH2010
• FP2010
• LAPS2010
• REMI2009
• I2006
• P2003
• F2002
• AS2002
• PD1999

Date	Code	Event	Description
Jun 14, 2010	STCH	INFORMATION ON STATUS: PATENT DISCONTINUATION	free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362
May 16, 2010	FP	LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE	Effective Date: May 16, 2010
May 16, 2010	LAPS	LAPSE FOR FAILURE TO PAY MAINTENANCE FEES
Dec 21, 2009	REMI	MAINTENANCE FEE REMINDER MAILED
May 16, 2006	I	Issuance
Feb 20, 2003	P	Published
Sep 27, 2002	F	Filing
Sep 24, 2002	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DEYOUNG, JAMES P.;MCCLAIN, JAMES B.;GROSS, STEPHEN M.;REEL/FRAME:013345/0864 Owner name: MICELL TECHNOLOGIES, INC., NORTH CAROLINA Effective Date: Sep 24, 2002
May 14, 1999	PD	Priority Date