Thermal actuator
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United States of America Patent
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May 16, 2006
Grant Date -
Dec 30, 2004
app pub date -
Apr 7, 2004
filing date -
Apr 8, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
An asymmetric MEMS thermal actuator device includes a base portion, typically a pair of bond pads, and an actuator element connected to the base portion by a flexure portion. The actuator element has a first arm and a second arm alongside the first arm and spaced from the first arm. The second arm is wider than the first arm so that the actuator element deflects about the flexure element due to differential heating in the first and second arms when an electrical current is passed therethrough. A cut-out portion is provided in the second arm adjacent the first arm so as to increase the spacing therefrom over at least a portion of the second arm. Preferably, a heat sink is also provided laterally adjacent the second arm.
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